LV-SC400-M Micro Scanning Vibrometer: 25 MHz Industrial R&D Vibration Analysis Solution

SUNNYINNOVA® Micro Scanning Vibrometers are state-of-the-art for noise and vibration measurement in research and development activities in many fields and industries. They can be used to determine frequency and mode shapes in MEMS validation as part of the evaluation and verification process.

The current micro scanning vibrometers have different versions for frequency range up to 25 MHz. The scanning heads based on the Helium-Neon (HeNe) laser allow refined measurement even on tiny structures due to the excellent laser spot.

Highlights

■ Non-contact technology for those tiny object to measure the velocity, displacement and acceleration

■ Modal analysis

■ Tiny spot, micron level

■ Objective lens selection for different working distances can be configured

■ Equipped with coaxial lighting and camera, easily and quickly determine the measurement position

■ Superior bandwidth and dynamic range

■ Ultra-high optical sensitivity, ultra-low noise, high spatial resolution

Company and R&D Team

The company holds complete independent intellectual property rights with over 50 authorized patents. It possesses comprehensive technical capabilities including optical design, circuit design and control, software algorithm development, and optical assembly debugging, enabling vertical integration from design to application.

The company has developed and marketed over 20 functional laser Doppler vibration measurement instruments, including 3D scanning laser vibrometers, full-field scanning laser vibrometers (covering infrared scanning and microscopic scanning types), microscopic laser vibrometers, infrared fiber laser vibrometers, multi-channel laser vibrometers, long-range laser vibrometers, differential laser vibrometers, and single-point laser vibrometers. These instruments are widely used in domestic universities, research institutes, aerospace, automotive, data storage, industrial, biomedical, and semiconductor manufacturing sectors. The company's products enjoy high recognition in China, serving over 300 universities and research institutions nationwide, with a market share ranking among the top domestic instruments of the same category.

In 2009, the company successfully developed China's first domestically produced laser Doppler vibration analyzer. For over a decade, the team has steadfastly pursued independent R&D, implementing a national strategy to replace imported high-end instruments with homegrown alternatives while maintaining a focused commitment to laser vibration measurement technology. Between 2013 and 2018, the team collaborated with leading Chinese universities and research institutes—including Tsinghua University, Peking University, and Zhejiang University—to complete two major projects: the "Development and Application of Cross-Scale 3D Photoelectric Vibration Measuring Instrument" and the "Micro-Nano Structure Dynamic Characterization Tester," both funded by the Ministry of Science and Technology. Additionally, the team actively participated in drafting national calibration standards for laser vibration analyzers, working with industry peers to address critical technological bottlenecks in China's laser vibration instrument sector.

The company's vision is to become the undisputed leader in the laser vibrometer industry. It will persistently drive independent innovation, continuously refine and deepen its expertise, and make new contributions to the journey of domestic instruments catching up with global advanced levels.